Scanning electron microscope with high resolution Merlin (Carl Zeiss, Germany)

The electron microscope Merlin (Carl Zeiss) is intended for visualization, analysis of crystalline surface structure, and chemical composition analysis. Equipped with the Oxford Instruments Nanoanalysis system, Merlin provides maximum analytical possibilities. The EDX spectrometer with high sensitivity and spectral resolution (Inca Energy X-Max), EBSD system (HKL), and WDS spectrometer (Inca Wave) are combined with the newest analytical system AZTEC, which allows microanalysis with ultrahigh spatial resolution (to 0.6 nm) and unique material contrast.